Chuck XY Stage - Programmable
Travel Range 210 mm X 300 mm (8.267in X 11.811in)
Resolution 0.5 μm
Accuracy +/- 2.0 μm
Repeatability +/- 2.0 μm
XY Stage Drive High Resolution Stepper Motor with Linear Encoder Feedback System
Speed 4-Speed XY Chuck Stage Adjustable Speed Movement