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    OAI 800FSA型光刻機(jī)

    應(yīng)用于半導(dǎo)體行業(yè):

    半導(dǎo)體加工設(shè)備-光刻設(shè)備-UV光刻機(jī)

    產(chǎn)品品牌

    OAI

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    10000

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    全國(guó)

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    品牌:OAI

    型號(hào):

    所屬系列:半導(dǎo)體加工設(shè)備-光刻設(shè)備-UV光刻機(jī)

     

    800FSA型光刻機(jī)系統(tǒng)

     

    OAI 800FSA型光刻機(jī)是一種半自動(dòng)化的光學(xué)式頂面掩模對(duì)準(zhǔn)器。它提供超精密(1μm-2μm)對(duì)準(zhǔn)精度,并設(shè)計(jì)為以極具競(jìng)爭(zhēng)力的價(jià)格大大超過(guò)任何可比的背面Aligner的性能。多功能800FSA型面罩Aligner非常適合用于小批量生產(chǎn),研發(fā)實(shí)驗(yàn)室和大學(xué)。

    800FSA型掩模對(duì)準(zhǔn)器可以配置多種OAI光源,功率高達(dá)2KW。掩模對(duì)準(zhǔn)器工具可容納高達(dá)8英寸正方形的基板,并且晶片卡盤被定位成允許容易地裝載和卸載。這種經(jīng)濟(jì)實(shí)惠的面罩對(duì)齊器具有電動(dòng)自動(dòng)調(diào)平和自動(dòng)間隙設(shè)置。

    建立在振動(dòng)隔離平臺(tái)上,固定面罩支架組件保證對(duì)準(zhǔn)精度和重復(fù)性。使用易于讀取的PLC觸摸屏簡(jiǎn)化操作。培訓(xùn)時(shí)間短;操作者可以在不到一小時(shí)內(nèi)有效地學(xué)習(xí)使用面罩對(duì)準(zhǔn)器。

    Model 800FSA Topside Mask Aligner System

    光刻機(jī)Model800FSA Topside Mask Aligner 

    The OAI Model 800FSA Mask Aligner is a semi-automated, optical Topside mask Aligner. It delivers ultra-precise (1µm-2µm) alignment accuracy and is designed to greatly surpass the performance of any comparable backside Aligner at an extremely competitive price. The versatile Model 800FSA mask Aligner is ideal for use in low volume production, R&D labs, and universities.

    The Model 800FSA Mask Aligner can be configured with a wide variety of OAI light sources that range in power up to 2KW. The mask Aligner tooling can accommodate substrates up to 8-inch square, and the wafer chuck is positioned to allow for easy loading and unloading. This cost-effective mask Aligner features motorized auto leveling and auto gap setting.

    Built on a vibration isolation platform, the fixed mask holder assembly guarantees alignment accuracy and repeatability. Operation is simplified using the easy-to-read, PLC touch-screen. Training time is short; an operator can learn to use the mask Aligner effectively in less than one hour.

    咨詢

    購(gòu)買之前,如有問(wèn)題,請(qǐng)向我們咨詢

    提問(wèn):
     

    能提供一下基片的尺寸范圍,分辨率、對(duì)準(zhǔn)精度這些參數(shù)嗎?

    wole  2017-07-28

    您好, 感謝您咨詢我司代理美國(guó)OAI光刻機(jī),
    基片的尺寸范圍: 8", 可以擴(kuò)展9"
    分辨率、對(duì)準(zhǔn)精度: 1UM

    聯(lián)系人: 廖先生 13538131258, QQ583129932

    2017-08-26

    請(qǐng)問(wèn)最大刻蝕深度多深?最深處刻寬多大?

    1346848  2017-07-26

    這個(gè)面罩對(duì)齊器的電動(dòng)自動(dòng)調(diào)平和自動(dòng)間隙設(shè)置一般時(shí)長(zhǎng)多長(zhǎng)??

    hunan347  2017-07-07

     你好,方便的話可以加下QQ聊下,方便交流。 QQ:583129932 廖經(jīng)理 電話:13538131258

    2017-07-07

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