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    Tencor6200

    應(yīng)用于半導(dǎo)體行業(yè):

    半導(dǎo)體測試設(shè)備-表面形貌測試

    庫       存:

    10000

    產(chǎn)       地:

    中國-江蘇省

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    所屬系列:半導(dǎo)體測試設(shè)備-表面形貌測試

     Description:
    The Surfscan 6200 is a versatile surface inspection tool designed to meet the needs of a broad range of applications. Utilizing the latest developments in optical technology, the system easily detects sub-micron particles on rough surfaces such as polysilicon and tungsten.

    Configuration:
    Defects Any surface that scatters less than 90% of incident light
    Defects sensitivity: 0.12um (>95% capturing rate)
    Repeatability: <1.5%
    Wafer Type:200mm, notch (SNNF), thickness: 725µm
    Laser type:30 mW Argon-Ion laser, 488 nm wavelength
    Computer OS :Windows9

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