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NanoCalc 反射膜厚測量系統(tǒng)

	薄膜的光學特性主要有反射和干涉。NanoCalc薄膜反射測量系統(tǒng)可以用來進行10nm -250um的膜厚分析測量，對單層膜的分辨率為0.1nm。根據(jù)測量軟件的不同，在1秒鐘內(nèi)可以分析單層或最多達到10層的膜厚。

產(chǎn)品特點

可分析單層或多層薄膜；
分辨率達0.1nm；
適合于在線監(jiān)測；

使用原理

最常用的兩種測量薄膜的特性的方法為光學反射和投射測量、橢圓光度法測量。NanoCalc利用反射原理，通過測量寬光譜范圍內(nèi)的反射率曲線來進行膜厚測量。

查找n和k值可以進行多達十層的薄膜測量，薄膜和基體材質(zhì)可以是金屬、電介質(zhì)、無定形材料或硅晶等。NanoCalc軟件包含了大多數(shù)材料的n和k值數(shù)據(jù)庫，用戶也可以自己添加和編輯。

查找n和k值

可以進行多達十層的薄膜測量，薄膜和基體材質(zhì)可以是金屬、電介質(zhì)、無定形材料或硅晶等。NanoCalc軟件包含了大多數(shù)材料的n和k值數(shù)據(jù)庫，用戶也可以自己添加和編輯。

應用

NanoCalc薄膜反射材料系統(tǒng)適合于在線膜厚測量，包括氧化層、中氮化硅薄膜、感光膠片及其它類型的薄膜。NanoCalc也可測量在鋼、鋁、銅、陶瓷、塑料等物質(zhì)上的抗反射涂層、抗磨涂層等。

NanoCalc Systems Available

NANOCALC-2000-UV-VIS-NIR
Wavelength:	250-1100 nm
Thickness:	10 nm-70 um
Light source:	Deuterium and Tungsten Halogen

NANOCALC-2000-UV-VIS
Wavelength:	250-850 nm
Thickness:	10 nm-20 um
Light source:	Deuterium and Tungsten Halogen

NANOCALC-2000-VIS-NIR
Wavelength:	400-1100 nm
Thickness:	20 nm-10 um (optional 1 um-250 um)
Light source:	Tungsten Halogen

NANOCALC-2000-VIS
Wavelength:	400-850 nm
Thickness:	50 nm-20 um
Light source:	Tungsten Halogen

NANOCALC-2000-NIR
Wavelength:	650-1100 nm
Thickness:	70 nm-70 um
Light source:	Tungsten Halogen

NANOCALC-2000-NIR-HR
Wavelength:	650-1100 nm
Thickness:	70 nm-70 um
Light source:	Tungsten Halogen

NANOCALC-2000-512-NIR
Wavelength:	900-1700 nm
Thickness:	50 nm-200 um
Light source:	High-power Tungsten Halogen

For Reflectometry applications, the following items are required:

NC-2UV-VIS100-2	Bifurcated UV fiber 400 um x 2m 2x SMA connectors Flexible metal jacketing
NC-STATE	Single point reflection measurement for non transparent samples
Step-Wafer	5 Steps 0-500 mm, calibrated 4"

If using a microscope, the following items are also needed:

NC-7UV-VIS200-2	Reflection probe for application microscopy with MFA-C-Mount
Step-Wafer	5 Steps 0-500 mm, calibrated 4"

NanoCalc Specifications

Angle of incidence:	90°
Number of layers:	3 or fewer
Reference measurement needed:	Yes (bare substrate)
Transparent materials:	Yes
Transmission mode:	Yes
Rough materials:	Yes
Measurement speed:	100 milliseconds to 1 second
On-line possibilities:	Yes
Mechanical tolerance (height):	With new reference or collimation (74-UV)
Mechanical tolerance (angle):	Yes, with new reference
Microspot option:	Yes, with microscope
Vision option:	Yes, with microscope
Mapping option:	6" and 12" XYZ mapping tables
Vacuum possibilities:	Yes

NanoCalc 反射膜厚測量系統(tǒng)

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NanoCalc Systems Available

For Reflectometry applications, the following items are required:

If using a microscope, the following items are also needed:

NanoCalc Specifications

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NanoCalc Systems Available

For Reflectometry applications, the following items are required:

If using a microscope, the following items are also needed:

NanoCalc Specifications

咨詢

裝箱清單

售后保障

應用于半導體行業(yè)的相關(guān)同類產(chǎn)品：

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