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一、公司介紹

工程工作現(xiàn)場(chǎng)全景

揚(yáng)州市神州科技有限公司成立于2003年，現(xiàn)有專(zhuān)業(yè)技術(shù)人員40人, 員工50人, 專(zhuān)業(yè)從事射頻等離子體電源的維修、維護(hù)及銷(xiāo)售，主要服務(wù)內(nèi)容包括：為半導(dǎo)體工廠，液晶面板工廠等提供AE, MKS(ENI), DAIHEN, AD-TEC, KYOSAN, RFPP等國(guó)際品牌的射頻電源、直流電源、匹配器、RPS及各類(lèi)半導(dǎo)體設(shè)備維修、銷(xiāo)售、客戶(hù)方案定制與老式機(jī)型替代，并提供現(xiàn)場(chǎng)支持服務(wù)。
公司主要客戶(hù)：TSMC, HYNIX, SMIC, IVO, JCAP, MEMSIC, HHNEC, SZ TIANMA, HEJIAN, JA SOLAR,SONY, TOSHIBA, BEST SOLAR等。

二、產(chǎn)品介紹

AE Dressler Cesar 1330 13.56MHz 3000W 射頻電源

Specification
Frequency	13.560 MHz +/- 0.005%
Max output power	3000 W into a 50??load
Min output power	30 W into a 50??load
Reflected power limit	600 W
Delivered power into mismatch	20% depending on the load impedance
Load impedance	50??
RF connector	50??, 7/16 type, female
RF power regulation mode	P forward, P delivered, or DC selfbias voltage
Regulation (of set point)	1.0 or 0.1% of full-rated power, whichever is greater, into a 50??load
Response time (ms)	\
Turn off/decay time (ms)	\
Harmonics	-45 dBc at full-rated power
Spurious content	-60 dBc max at full-rated power
Pulse mode	Yes
Pulse repetition frequency	1 to 30 kHz
Pulse duty cycle	1% to 99%
Pulse RF envelope rise / fall time (ms)	\
CEX operation mode	Yes
CEX input signal as required	0 to +10 dbm
CEX output signal specifications	+3 to +10 dbm
CEX connector (50??)	BNC, female
Display	LCD graphic display
Display	256 x 132 dots , black / white

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三、品質(zhì)保障

我們所銷(xiāo)售的電源、匹配器及RPS等如無(wú)特殊說(shuō)明，均提供6個(gè)月的免費(fèi)保修服務(wù)。

我們?yōu)殇N(xiāo)售產(chǎn)品提供終身維修服務(wù)，并可提供EXCHANGE服務(wù)，保證客戶(hù)的生產(chǎn)正常進(jìn)行。

四、運(yùn)輸

包裝箱方式

我們?yōu)樗谐鰪S的機(jī)器提供最結(jié)實(shí)的包裝，保證運(yùn)輸過(guò)程中機(jī)器的安全。

Specification
Frequency	13.560 MHz +/- 0.005%
Max output power	3000 W into a 50??load
Min output power	30 W into a 50??load
Reflected power limit	600 W
Delivered power into mismatch	20% depending on the load impedance
Load impedance	50??
RF connector	50??, 7/16 type, female
RF power regulation mode	P forward, P delivered, or DC selfbias voltage
Regulation (of set point)	1.0 or 0.1% of full-rated power, whichever is greater, into a 50??load
Response time (ms)	\
Turn off/decay time (ms)	\
Harmonics	-45 dBc at full-rated power
Spurious content	-60 dBc max at full-rated power
Pulse mode	Yes
Pulse repetition frequency	1 to 30 kHz
Pulse duty cycle	1% to 99%
Pulse RF envelope rise / fall time (ms)	\
CEX operation mode	Yes
CEX input signal as required	0 to +10 dbm
CEX output signal specifications	+3 to +10 dbm
CEX connector (50??)	BNC, female
Display	LCD graphic display
Display	256 x 132 dots , black / white
Interlocks and Limits
Reflected power	Yes
Overtemperature	Yes
Current limit	Yes
DC overload	Yes
RF power limit	Yes
Cooling
Cooling	Water Cooling
Air cooling requirement	118 m/h3
Min cooling water flow rate	4.5 lpm
Cooling water pressure	0.5 bar (7.25 psi)
Cooling water pressure	Differential as required to achieve min flow rate
Max cooling water pressure	8 bar (116.03 psi)
Max cooling water pressure	Max inlet; not recommended for operation
Cooling water temperature	20 to 30 °C (68 to 86 °F)
Cooling water temperature	Must be always higher than ambient to avoid condensation
Coolant connectors / fittings	For plastic tubing of 100 mm OD/8 mm ID
AC Power Line
AC line voltage (3-phase)	3 x 200 VAC (180 VAC to 230 VAC)
AC line frequency	50/60 Hz
AC line current (per phase)	3 x 16 A nominal line, full power
AC input power	4950 VA
Efficiency line to load	65%
Power factor	90%
AC mains connection	Open mains cable at full power
Physical Specification
Packaging	19" rack cabinet
Mounting	19" rack mounting
Weight	32.5 kg (71.65 lb)
Clearance	60 mm (2.36") on each side for air flow into unit
Dimensions	133 mm (H) x 483 mm (W) x 550 mm (D)
Dimensions	5.24" (H) x 19" (W) x 21.65" (D)
Interfaces	Interlock
	Matching interface
	Diagnostic interface

AE Dressler Cesar 1330 13.56MHz(3000W)射頻電源維修及銷(xiāo)售

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AE Dressler Cesar 1330 13.56MHz(3000W)射頻電源 維修及銷(xiāo)售

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AE Dressler Cesar 1330 13.56MHz(3000W)射頻電源維修及銷(xiāo)售