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負(fù)性光刻膠:A、粘性增強負(fù)性光刻膠 B、高級加工負(fù)膠 C、用于剝離的負(fù)膠
正性光刻膠:A、粘性增強正性光刻膠
非光刻涂層:A、特別涂層PC3 B、旋涂玻璃:SOG C、旋涂摻雜涂層
輔助化學(xué)品:A、邊膠清洗劑 B、光膠顯影劑 C、光膠去除劑
負(fù)膠 | 正膠 | ||||||
i線曝光用粘度增強負(fù)膠 | g和h線曝光用粘度增強負(fù)膠 | i線曝光的高級加工負(fù)膠 | g和h線曝光的高級加工負(fù)膠 | i線曝光的負(fù)膠 | g、h線曝光的負(fù)膠 | 光膠 | 厚度 |
NP9–250P | NP9G–250P | NR71-250P | NR71G-250P | NR71-1000PY | NR71G-1000PY | PR1-500A | 0.4μm ~ 0.9μm |
NP9–1000P | NP9G–1000P | NR71-350P | NR71G-350P | NR71-1500PY | NR71G-1500PY | PR1-1000A | 0.7μm ~ 2.0μm |
NP9–1500P | NP9G–1500P | NR71-1000P | NR71G-1000P | NR71-3000PY | NR71G-3000PY | PR1-1500A | 1.3μm ~ 3.0μm |
NP9–3000P | NP9G–3000P | NR71-1500P | NR71G-1500P | NR71-6000PY | NR71G-6000PY | PR1-2000A | 1.7μm ~ 4.0μm |
NP9–6000P | NP9G–6000P | NR71-3000P | NR71G-3000P | NR9-100PY | NR9G-100PY | PR1-4000A | 3.7μm ~ 10.0μm |
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